DE General Open

Construction of LPCVD Cluster System

Published 10 March 2026

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Location

Dresden, Germany

schedule

Deadline

10 April 2026

4 days remaining

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Suggested bid value

~EUR 1,500,000

source

Source

bund.de

Description

This German public procurement tender seeks a contractor to build a Low-Pressure Chemical Vapor Deposition (LPCVD) cluster system in Dresden. The system must include TEOS, nitride, poly, and oxidation deposition capabilities. This suggests a technically demanding project requiring specialized expertise in semiconductor equipment construction and installation. The 'cluster system' aspect implies multiple interconnected processing chambers, indicating a relatively complex undertaking. The project likely involves close collaboration with the end-user to ensure the system meets specific performance requirements.

Original description

This tender is for the construction of a Low-Pressure Chemical Vapor Deposition (LPCVD) cluster system including TEOS, nitride, poly, and oxidation components. The project is located in Dresden.

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